THE CONCEPT OF 2 MOBILITIES IN HOMOEPITAXIAL GROWTH

被引:39
作者
ROSENFELD, G [1 ]
POELSEMA, B [1 ]
COMSA, G [1 ]
机构
[1] UNIV TWENTE, FAC TECH NATUURKUNDE, 7500 AE ENSCHEDE, NETHERLANDS
关键词
D O I
10.1016/0022-0248(95)00077-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A general kinetic concept is introduced which can be used to control growth modes in homoepitaxy. Its basic idea is that during growth of a layer, the characteristic length scale associated with nucleation is deliberately varied. The power of this concept lies in the fact that it can be realized experimentally in a variety of ways and is not restricted to special systems. It helps to understand various effects reported in the literature and may serve as a guideline for future methods of growth manipulation.
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收藏
页码:230 / 233
页数:4
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