THE GASEOUS ELECTRONICS CONFERENCE RF REFERENCE CELL - AN INTRODUCTION

被引:78
作者
OLTHOFF, JK [1 ]
GREENBERG, KE [1 ]
机构
[1] UNIV NEW MEXICO, DEPT CHEM & NUCL ENGN, ALBUQUERQUE, NM 87131 USA
关键词
GASEOUS ELECTRONICS CONFERENCE; PLASMA REACTOR; RADIO FREQUENCY; REFERENCE CELL;
D O I
10.6028/jres.100.025
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This paper provides an introduction to the Gaseous Electronics Conference (GEC) RF Reference Cell, and to the articles published in this Special Issue of the Journal of Research of the National institute of Standards and Technology. A brief summary of the history and purpose of the Reference Cell concept is presented, and recent changes to the GEC Cell design are documented. The paper concludes with high lights of research performed on GEC Cells, and with an appendix of all known publications that present research performed on GEC Cells.
引用
收藏
页码:327 / 339
页数:13
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