Fabrication of Si/SiO2 nanocomposite thin films

被引：6
|
作者：
Chang, ITH
Cantor, B
Leigh, PA
Dobson, PJ
机构：
[1] Oxford Centre for Advanced Materials and Composites, University of Oxford, Oxford, Parks Road
来源：
NANOSTRUCTURED MATERIALS | 1995年 / 6卷 / 5-8期
基金：
英国工程与自然科学研究理事会;
关键词：
D O I：
10.1016/0965-9773(95)00189-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Si-rich SiO2 films were deposited onto Si and quartz substrates by rf co-sputtering, and then annealed under vacuum at temperatures between 500 to 900 degrees C for 1 hour. A combination of high resolution transmission electron microscopy, optical ellipsometry, and UV/VIS and FTIR photospectrometry were used to investigate the microstructures and optical properties of the co-sputtered films before and after annealing. The as-deposited films consisted of a fully amorphous SiOx(1<x<2) structure. After annealing, the films consisted of clusters of crystalline Si with average sizes in the range between 3nm and 8nm embedded in a stoichiometric SiO2 amorphous matrix.
引用
收藏
页码：835 / 838
页数：4
相关论文
共 50 条
  • [21] MEASUREMENTS OF THIN OXIDE-FILMS OF SIO2/SI(100)
    LENNARD, WN
    MASSOUMI, GR
    MITCHELL, IV
    TANG, HT
    MITCHELL, DF
    BARDWELL, JA
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4): : 42 - 46
  • [22] SPECTROPHOTOMETRIC THICKNESS MEASUREMENT FOR VERY THIN SIO2 FILMS ON SI
    RAND, MJ
    JOURNAL OF APPLIED PHYSICS, 1970, 41 (02) : 787 - &
  • [23] Electrical characterization of Si nanoparticles embedded in SiO2 thin films
    Do Kim, Yang
    Kim, Eun Kyu
    Lee, Soojin
    Cho, Woon Jo
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2006, 49 (03) : 1192 - 1195
  • [24] ACOUSTIC ANOMALIES IN AMORPHOUS THIN-FILMS OF SI AND SIO2
    VONHAUMEDER, M
    STROM, U
    HUNKLINGER, S
    PHYSICAL REVIEW LETTERS, 1980, 44 (02) : 84 - 87
  • [25] Radiation effect on the photoluminescence properties of Si/SiO2 thin films
    Zhong, Kun
    Xiao, Zhisong
    Cheng, Xiangqian
    Zhu, Fang
    Yan, Lu
    Zhang, Feng
    Cheng, Guoan
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 267 (18): : 3114 - 3117
  • [26] GISAXS study of Si nanocrystals formation in SiO2 thin films
    Pivac, B.
    Kovacevic, I.
    Dubcek, P.
    Radic, N.
    Bernstoff, S.
    THIN SOLID FILMS, 2006, 515 (02) : 756 - 758
  • [27] Fabrication and characterization of TiO2–SiO2 composite nanoparticles and polyurethane/(TiO2–SiO2) nanocomposite films
    Li Chen
    Haixia Shen
    Zhen Lu
    Cang Feng
    Su Chen
    Yanru Wang
    Colloid and Polymer Science, 2007, 285
  • [28] Optical, mechanical and structural properties of PMMA/SiO2 nanocomposite thin films
    Soni, Gyanesh
    Srivastava, Subodh
    Soni, Purushottam
    Kalotra, Pankaj
    Vijay, Y. K.
    MATERIALS RESEARCH EXPRESS, 2018, 5 (01):
  • [29] ZnO/SiO2 nanocomposite thin films by sol-gel method
    Musat, V.
    Fortunata, E.
    Petrescu, S.
    do Rego, A. M. Botelho
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2008, 205 (08): : 2075 - 2079
  • [30] Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing
    Steblova, O. V.
    Evtukh, A. A.
    Bratus, O. L.
    Fedorenko, L. L.
    Voitovych, M. V.
    Lytvyn, O. S.
    Gavrylyuk, O. O.
    Semchuk, O. Yu.
    SEMICONDUCTOR PHYSICS QUANTUM ELECTRONICS & OPTOELECTRONICS, 2014, 17 (03) : 295 - 300
12345