SILICON SURFACES - METALLIC CHARACTER, OXIDATION AND ADHESION

被引:37
作者
CROS, A [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
JOURNAL DE PHYSIQUE | 1983年 / 44卷 / 06期
关键词
D O I
10.1051/jphys:01983004406070700
中图分类号
学科分类号
摘要
引用
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页码:707 / 711
页数:5
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