QUANTITATIVE DEPTH PROFILE AND BULK ANALYSIS WITH HIGH DYNAMIC-RANGE BY ELECTRON-GAS SPUTTERED NEUTRAL MASS-SPECTROMETRY

被引：93
作者：
JEDE, R
PETERS, H
DUNNEBIER, G
GANSCHOW, O
KAISER, U
SEIFERT, K
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 04期
关键词：
D O I：
10.1116/1.575023
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2271 / 2279
页数：9
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