PHYSICOCHEMICAL CHARACTERIZATION OF SPUTTERED IRIDIUM OXIDE

被引：12
作者：
AURIANBLAJENI, B
BOUCHER, MM
KIMBALL, AG
ROBBLEE, LS
机构：
来源：
JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 02期
关键词：
D O I：
10.1557/JMR.1989.0440
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：440 / 446
页数：7
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