CHEMICAL ETCHING OF Y-CU-BA-O THIN-FILMS

被引：44
作者：
SHIH, I
QIU, CX
机构：
来源：
APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 18期
关键词：
D O I：
10.1063/1.99695
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1523 / 1524
页数：2
相关论文
共 8 条
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[2]   SUPERCONDUCTING Y-BA-CU-O OXIDE-FILMS BY SPUTTERING [J].
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[3]   PREPARATION OF Y-BA-CU-O THIN-FILMS ON MGO BY DC MAGNETRON SPUTTERING FROM A STOICHIOMETRIC Y1BA2CU3O7-DELTA TARGET [J].
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[5]   SYNTHESIS OF Y-BA-CU-O THIN-FILMS ON SAPPHIRE SUBSTRATES BY RF MAGNETRON SPUTTERING [J].
MICHIKAMI, O ;
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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (07) :L1199-L1201
[6]   PREPARATION OF Y-BA-CU-O THIN-FILMS BY RF-MAGNETRON SPUTTERING [J].
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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (09) :L1484-L1486
[7]   MAGNETRON SPUTTERING AND LASER PATTERNING OF HIGH TRANSITION-TEMPERATURE CU OXIDE-FILMS [J].
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[8]   SUPERCONDUCTIVITY AND RESPUTTERING EFFECTS IN RF-SPUTTERED YBA2CU3O7-X THIN-FILMS [J].
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