AN ACOUSTIC MICROMETER AND ITS APPLICATION TO LAYER THICKNESS MEASUREMENTS

被引：11
作者：
TSUKAHARA, Y [1 ]
NAKASO, N [1 ]
KUSHIBIKI, JI [1 ]
CHUBACHI, N [1 ]
机构：
[1] TOHOKU UNIV, FAC ENGN, DEPT ELECT ENGN, SENDAI, MIYAGI 980, JAPAN
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1989年 / 36卷 / 03期
关键词：
D O I：
10.1109/58.19171
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
引用
收藏
页码：326 / 331
页数：6
相关论文
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TSUKAHARA Y, 1984, P IEEE ULTRASONICS S, P992
[13]   ACOUSTIC MICROSCOPY APPLIED TO SAW DISPERSION AND FILM THICKNESS MEASUREMENT [J].
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