AN ACOUSTIC MICROMETER AND ITS APPLICATION TO LAYER THICKNESS MEASUREMENTS

被引：11

作者：

TSUKAHARA, Y ^{[1
]}

NAKASO, N ^{[1
]}

KUSHIBIKI, JI ^{[1
]}

CHUBACHI, N ^{[1
]}

机构：

[1] TOHOKU UNIV, FAC ENGN, DEPT ELECT ENGN, SENDAI, MIYAGI 980, JAPAN

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1989年 / 36卷 / 03期

关键词：

D O I：

10.1109/58.19171

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

引用

页码：326 / 331

页数：6

共 13 条

[1]

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[2]

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[3]

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[4] DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].

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[5] LEAKY RAYLEIGH-WAVES ON A LAYERED HALF-SPACE [J].

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[7] APPLICATION OF LFB ACOUSTIC MICROSCOPE TO FILM THICKNESS MEASUREMENTS [J].

KUSHIBIKI, J ;

CHUBACHI, N .

ELECTRONICS LETTERS, 1987, 23 (12) :652-654

[8] MATERIAL CHARACTERIZATION BY LINE-FOCUS-BEAM ACOUSTIC MICROSCOPE [J].

KUSHIBIKI, J ;

CHUBACHI, N .

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1985, 32 (02) :189-212

[9] HIGH-PERFORMANCE REAL-TIME HETERODYNE INTERFEROMETRY [J].

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NELSON, RD ;

HOLLY, S .

APPLIED OPTICS, 1979, 18 (11) :1797-1803

[10]

Sezawa K., 1935, B EARTHQ RES I TOKYO, V11, P13, DOI [10.2183/pjab1912.11.13, DOI 10.2183/PJAB1912.11.13]

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