TRANSPARENT CONDUCTIVE SN-DOPED INDIUM OXIDE COATINGS DEPOSITED BY REACTIVE SPUTTERING WITH A POST CATHODE

被引：48

作者：

THORNTON, JA ^{[1
]}

HEDGCOTH, VL ^{[1
]}

机构：

[1] TELIC CORP,1631 COLORADO AVE,SANTA MONICA,CA 90404

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.568876

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：117 / 121

页数：5

共 14 条

[1] STRUCTURE OF INDIUM OXIDE TIN OXIDE TRANSPARENT CONDUCTING FILMS BY ELECTRON-DIFFRACTION AND ELECTRON SPECTROSCOPY [J].

BOSNELL, JR ;

WAGHORNE, R .

THIN SOLID FILMS, 1973, 15 (02) :141-148

[2] HIGHLY CONDUCTIVE, TRANSPARENT FILMS OF SPUTTERED IN2-XSNXO3-Y [J].

FRASER, DB ;

COOK, HD .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (10) :1368-&

[3]

GILLERY FH, 1972, INF DISPLAY-J SOC I, V9, P17

[4] STUDY OF FILMS HAVING BASE OF TIN OXIDE AND INDIUM OXIDE BY MEANS OF X-RAY-DIFFRACTION [J].

HECQ, M ;

DUBOIS, A ;

VANCAKEN.J .

THIN SOLID FILMS, 1973, 18 (01) :117-125

[5]

KROECK WH, 1971, P288 KOD PUBL, P54

[6] SPUTTERED CADMIUM OXIDE AND INDIUM OXIDE TIN OXIDE-FILMS AS TRANSPARENT ELECTRODES TO CADMIUM SULFIDE [J].

MEHTA, RR ;

VOGEL, SF .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (06) :752-&

[7] CHARACTERIZATION OF TRANSPARENT CONDUCTIVE THIN-FILMS OF INDIUM OXIDE [J].

MOLZEN, WW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :99-102

[8]

PANKRATZ JM, 1972, J ELECTRON MATER, V1, P95

[9] TRANSPARENT INDIUM CONTACTS TO CDS [J].

SIHVONEN, YT ;

BOYD, DR .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1960, 31 (09) :992-994

[10] INFLUENCE OF APPARATUS GEOMETRY AND DEPOSITION CONDITIONS ON STRUCTURE AND TOPOGRAPHY OF THICK SPUTTERED COATINGS [J].

THORNTON, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04) :666-670

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