ELECTRON-ENERGY DISTRIBUTIONS AND EXCITATION RATES IN HIGH-FREQUENCY ARGON DISCHARGES

被引:86
作者
FERREIRA, CM [1 ]
LOUREIRO, J [1 ]
机构
[1] Univ Tecn Lisboa, INST SUPER TECN, CTR ELECTRODINAM, P-1096 LISBON, PORTUGAL
关键词
D O I
10.1088/0022-3727/16/12/024
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2471 / 2483
页数:13
相关论文
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