ION-IMPLANTATION AND THERMAL ANNEALING OF ALPHA-AL2O3 SINGLE-CRYSTALS

被引：74

作者：

NARAMOTO, H

WHITE, CW

WILLIAMS, JM

MCHARGUE, CJ

HOLLAND, OW

ABRAHAM, MM

APPLETON, BR

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 02期

关键词：

D O I：

10.1063/1.332076

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：683 / 698

页数：16

共 28 条

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