共 10 条
[2]
FRENCH PH, 1984, ELECTRON LETT, V24, P999
[3]
LOW-COST PRESSURE FORCE TRANSDUCER WITH SILICON THIN-FILM STRAIN-GAUGES
[J].
SENSORS AND ACTUATORS,
1983, 4 (02)
:183-189
[6]
MANDURAH MM, 1981, THESIS STANFORD U
[7]
NISHIDON S, 1983, THIN SOLID FILMS, V112
[10]
WARTMAN JJ, 1965, J APPL PHYS, V36, P153