MICROWAVE ION-SOURCE

被引:113
作者
SAKUDO, N [1 ]
TOKIGUCHI, K [1 ]
KOIKE, H [1 ]
KANOMATA, I [1 ]
机构
[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
关键词
D O I
10.1063/1.1135144
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:762 / 766
页数:5
相关论文
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