HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDIES OF NATIVE OXIDE ON SILICON

被引：0

作者：

MAZUR, JH ^{[1
]}

GRONSKY, R ^{[1
]}

WASHBURN, J ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,DIV MAT SCI & MOLEC RES,BERKELEY,CA 94720

来源：

INSTITUTE OF PHYSICS CONFERENCE SERIES | 1983年 / 67期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：77 / 82

页数：6

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