LASER-INDUCED CRYSTALLIZATION OF A-SI - H THIN-FILMS

被引：1
|
作者：
HAJTO, J
GAZSO, J
ZENTAI, G
SOMOGYI, IK
机构：
来源：
JOURNAL DE PHYSIQUE LETTRES | 1982年 / 43卷 / 03期
关键词：
D O I：
10.1051/jphyslet:0198200430309700
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：L97 / L102
页数：6
相关论文
共 50 条
  • [41] Step-by-step excimer laser induced crystallization of a-Si:H
    Lengsfeld, P
    Nickel, NH
    Fuhs, W
    APPLIED PHYSICS LETTERS, 2000, 76 (13) : 1680 - 1682
  • [42] Photoconductivity of thin a-Si:H films
    Kazanskii, A. G.
    Koshelev, O. G.
    Sazonov, A. Yu.
    Khomich, A. A.
    SEMICONDUCTORS, 2008, 42 (02) : 192 - 194
  • [43] KINETICS OF LASER-INDUCED LIQUID-METAL ETCHING OF A-SI FILMS
    BOSTANJOGLO, O
    ENDRUSCHAT, E
    TORNOW, W
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1985, 90 (02): : 457 - 462
  • [44] LASER-INDUCED ACOUSTIC PHONON GRATINGS IN SEMICONDUCTOR THIN-FILMS
    WANG, J
    HUTCHINGS, DC
    MILLER, A
    VANSTRYLAND, EW
    WELFORD, KR
    MUIRHEAD, IT
    LEWIS, KL
    JOURNAL OF APPLIED PHYSICS, 1993, 73 (10) : 4746 - 4751
  • [45] LOW-TEMPERATURE FABRICATION OF POLY-SI TFT BY LASER-INDUCED CRYSTALLIZATION OF A-SI
    MASUMO, K
    KUNIGITA, M
    TAKAFUJI, S
    YUKI, M
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 115 (1-3) : 147 - 149
  • [46] LASER-INDUCED THERMAL PROFILES IN THERMALLY AND OPTICALLY THIN-FILMS
    BLOISI, F
    VICARI, L
    CAVALIERE, P
    MARTELLUCCI, S
    QUARTIERI, J
    MORMILE, P
    PIERATTINI, G
    APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1988, 47 (01): : 67 - 69
  • [47] LASER-INDUCED PHASE-TRANSITION IN IRON THIN-FILMS
    TEODORESCU, VS
    MIHAILESCU, IN
    DINESCU, M
    CHITICA, N
    NISTOR, LC
    VANLANDUYT, J
    BARBORICA, A
    JOURNAL DE PHYSIQUE IV, 1994, 4 (C4): : 127 - 130
  • [48] LASER-INDUCED PLASMA - A SOURCE OF CONTROL OF THE PROPERTIES OF THIN-FILMS
    KREUTZ, EW
    VOSS, A
    ALUNOVIC, M
    FUNKEN, J
    SUNG, H
    SURFACE & COATINGS TECHNOLOGY, 1993, 59 (1-3): : 26 - 31
  • [49] INSITU OPTICAL CHARACTERIZATIONS FOR RF PLASMA DEPOSITED A-SI - H THIN-FILMS
    CANILLAS, A
    BERTRAN, E
    ANDUJAR, JL
    MORENZA, JL
    VACUUM, 1989, 39 (7-8) : 785 - 787
  • [50] Femtosecond and nanosecond laser pulse crystallization of thin a-Si:H films on non-refractory glass substrates
    Volodin, V. A.
    Efremov, M. D.
    Kachurin, G. A.
    Kochubei, S. A.
    Cherkov, A. G.
    Deutschmann, M.
    Baersch, N.
    GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XII, 2008, 131-133 : 479 - +
12345