EVALUATION OF A LIQUID-METAL ION-SOURCE FOR SECONDARY ION MASS-SPECTROMETRY

被引:10
作者
GNASER, H [1 ]
RUDENAUER, FG [1 ]
机构
[1] AUSTRIAN RES CTR SEIBERSDORF,A-1082 VIENNA,AUSTRIA
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期
关键词
D O I
10.1016/0167-5087(83)90995-X
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:303 / 306
页数:4
相关论文
共 18 条
[1]  
Castaing R., 1962, J MICROSCOPIE, V1, P395
[2]  
GNASER H, NUCL INSTR METH
[3]  
HIGATSBERGER MJ, 1982, SECONDARY ION MASS S, V3, P38
[4]   ION-SOURCE OF HIGH BRIGHTNESS USING LIQUID-METAL [J].
KROHN, VE ;
RINGO, GR .
APPLIED PHYSICS LETTERS, 1975, 27 (09) :479-481
[5]   ION MICROPROBE MASS ANALYZER [J].
LIEBL, H .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (13) :5277-&
[6]   BEAM OPTICS IN SECONDARY ION MASS-SPECTROMETRY [J].
LIEBL, H .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 187 (01) :143-151
[7]   SECONDARY ION MASS-SPECTROMETRIC IMAGE DEPTH PROFILING FOR 3-DIMENSIONAL ELEMENTAL ANALYSIS [J].
PATKIN, AJ ;
MORRISON, GH .
ANALYTICAL CHEMISTRY, 1982, 54 (01) :2-5
[8]  
PREWETT PD, 1980, I PHYS C SER, V54, P316
[9]  
REUTER W, 1982, 9TH INT MASS SPECTR
[10]  
RUDENAUER FG, 1981, MIKROCHIM ACTA, V2, P375