EFFECTS OF ION-IMPLANTATION ON POLYCRYSTALLINE DIAMOND FILMS

被引:3
|
作者
ZHANG, XK
GUO, JG
YAO, YF
FANG, F
机构
[1] Shanghai Institute of Metallurgy, Academia Sinica
关键词
D O I
10.1016/0042-207X(92)90327-S
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effects of ion implantation on the resistivity and structure of polycrystalline diamond films which were prepared by hot-filament chemical vapor deposition using methane as the reactant gas are reported. Ion implantation was carried out with 80 ke V P+ ions at different temperatures. The depth profile of P+ in diamond measured by RBS is consistent with the results of TRIM calculation. After ion bombardment the resistivity of CVD diamond films decreases to a saturated value. The structural changes after ion irradiation were characterized by SEM and Raman spectra, and the conduction mechanism is also discussed.
引用
收藏
页码:1047 / 1049
页数:3
相关论文
共 50 条
  • [1] ION-IMPLANTATION OF DIAMOND AND DIAMOND FILMS
    PRAWER, S
    DIAMOND AND RELATED MATERIALS, 1995, 4 (5-6) : 862 - 872
  • [2] DOPING OF POLYCRYSTALLINE DIAMOND BY BORON ION-IMPLANTATION
    KALISH, R
    UZANSAGUY, C
    SAMOILOFF, A
    LOCHER, R
    KOIDL, P
    APPLIED PHYSICS LETTERS, 1994, 64 (19) : 2532 - 2534
  • [3] Ion-implantation in diamond and diamond films: Doping, damage effects and their applications
    Kalish, Rafi
    Applied Surface Science, 1997, 117-118 : 558 - 569
  • [4] Ion-implantation in diamond and diamond films: Doping, damage effects and their applications
    Kalish, R
    APPLIED SURFACE SCIENCE, 1997, 117 : 558 - 569
  • [5] GRAPHITIZATION OF DIAMOND FILMS INDUCED BY ION-IMPLANTATION
    ZHANG, XK
    FANG, F
    GUO, JG
    YAO, YF
    ZHOU, ZY
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1992, 129 (02): : K97 - K99
  • [6] ION-IMPLANTATION INTO DIAMOND
    VAVILOV, VS
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 37 (3-4): : 229 - 236
  • [7] ION-IMPLANTATION EFFECTS IN POLYCRYSTALLINE WO3 THIN-FILMS
    TATE, TJ
    GARCIAPARAJO, M
    GREEN, M
    JOURNAL OF APPLIED PHYSICS, 1991, 70 (07) : 3509 - 3511
  • [8] Ion-implantation of erbium to the nanocrystalline diamond thin films
    Nekvindova, P.
    Babchenko, O.
    Cajzl, J.
    Kromka, A.
    Mackova, A.
    Malinsky, P.
    Oswald, J.
    Prajzler, V.
    Remes, Z.
    Varga, M.
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2016, 18 (7-8): : 679 - 684
  • [9] SOLID-PHASE EPITAXY OF POLYCRYSTALLINE SILICON FILMS - EFFECTS OF ION-IMPLANTATION DAMAGE
    QUACH, NT
    REIF, R
    APPLIED PHYSICS LETTERS, 1984, 45 (08) : 910 - 912
  • [10] ION-IMPLANTATION OF CARBON IN DIAMOND
    DERRY, TE
    SELLSCHOP, JPF
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 23 - 26