DEPOSITION AND PHOTOCONDUCTIVITY OF HYDROGENATED AMORPHOUS-SILICON FILMS BY THE PYROLYSIS OF DISILANE

被引：21
|
作者：
CHU, TL [1 ]
CHU, SS [1 ]
ANG, ST [1 ]
LO, DH [1 ]
DUONG, A [1 ]
HWANG, CG [1 ]
机构：
[1] POLY SOLAR INC,GARLAND,TX 75041
来源：
JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 04期
关键词：
D O I：
10.1063/1.336525
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1319 / 1322
页数：4
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