ION-IMPLANTATION AND ION ASSISTED COATING OF METALS

被引:25
作者
DEARNALEY, G [1 ]
GOODE, PD [1 ]
MINTER, FJ [1 ]
PEACOCK, AT [1 ]
WADDELL, CN [1 ]
机构
[1] UNIV SO CALIF,DEPT PHYS,LOS ANGELES,CA 90089
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期
关键词
D O I
10.1116/1.572815
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2684 / 2689
页数:6
相关论文
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