SYNTHESIS OF COMPOUNDS BY HIGH-FLUENCE NITROGEN ION-IMPLANTATION IN TITANIUM

被引:9
作者
RAUSCHENBACH, B
HOCHMUTH, K
机构
[1] Akad der Wissenschaften der DDR, Dresden, East Ger, Akad der Wissenschaften der DDR, Dresden, East Ger
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 94卷 / 02期
关键词
D O I
10.1002/pssa.2210940251
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
14
引用
收藏
页码:833 / 837
页数:5
相关论文
共 15 条
[1]   FORMATION OF CHEMICAL COMPOUNDS BY ION-BOMBARDMENT OF THIN TRANSITION-METAL FILMS [J].
BELII, IM ;
KOMAROV, FF ;
TISHKOV, VS ;
YANKOVSKII, VM .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 45 (01) :343-352
[2]   PHASE-TRANSFORMATIONS AT BOMBARDMENT OF THIN-FILMS WITH IONS [J].
BYKOV, VN ;
TROYAN, VA ;
ZDOROVTSEVA, GG ;
KHAIMOVICH, VS .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 32 (01) :53-61
[3]   TITANIUM NITRIDE FILMS PREPARED BY ION-IMPLANTATION [J].
CHEN, PA ;
YANG, TT .
THIN SOLID FILMS, 1981, 81 (01) :L91-L92
[4]   ION-BOMBARDMENT OF GROUP-IV ELEMENTAL METAL AND SYNTHETIC NITRIDE FILMS [J].
DUCKWORTH, RG ;
WILSON, IH .
THIN SOLID FILMS, 1979, 63 (02) :289-297
[6]   NITROGEN IMPLANTATION IN TITANIUM - RBS, THEED AND TEM ANALYSIS [J].
GAUTHIER, JP ;
FLECHE, D ;
PIVOT, J ;
ROGER, JA .
VACUUM, 1984, 34 (10-1) :1013-1016
[7]   THE MICROSTRUCTURE OF REACTIVELY SPUTTERED TI-N FILMS CONTAINING THE TI2N PHASE [J].
HIBBS, MK ;
SUNDGREN, JE ;
JOHANSSON, BO ;
JACOBSON, BE .
ACTA METALLURGICA, 1985, 33 (05) :797-803
[8]   HIGH FLUENCE IMPLANTATION OF NITROGEN-IONS INTO TITANIUM [J].
HOHMUTH, K ;
RAUSCHENBACH, B .
MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (02) :489-499
[9]   FATIGUE AND WEAR OF METALLOID-ION-IMPLANTED METALS [J].
HOHMUTH, K ;
RICHTER, E ;
RAUSCHENBACH, B ;
BLOCHWITZ, C .
MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :191-201
[10]   CHARACTERIZATION OF AMORPHOUS SURFACE-LAYERS IN FE IMPLANTED WITH TI AND C [J].
KNAPP, JA ;
FOLLSTAEDT, DM ;
DOYLE, BL .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :38-43