Telescoping self-aligned metal-catalyzed carbon nanotube piezoresistors as strain gauges

被引：0

作者：

Tabib-Azar, M. ^{[1
]}

机构：

[1] Cape Western Univ, Elect Engn & Comp Sci Dept, Cleveland, OH 44106 USA

来源：

PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART N-JOURNAL OF NANOMATERIALS NANOENGINEERING AND NANOSYSTEMS | 2007年 / 221卷 / 03期

关键词：

carbon nanotubes; chemical vapour deposition; strain gauges;

D O I：

10.1243/17403499JNN108

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Multiwalled carbon nanotube (MWCNT) bridges, grown using low-pressure, metalcatalyzed, chemical vapour deposition (CVD) technique between silicon posts, were used as tiny piezoresistors to monitor vibration and bending/deformation of silicon cantilever beams. The weld strength of the CNTs, measured using atomic force microscopy (AFM), was larger than 100 nN/CNT and their full-scale resistance change was larger than 10 5 V. The effective longitudinal piezoresistivity of these CNTs was larger than 4 x 10(-8) Pa-1, which is larger than that of P44 in silicon.

引用

页码：93 / 99

页数：7

共 27 条

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