CRUCIAL ROLE OF RESIDUAL GASES IN AMORPHIZATION OF CRYSTALLINE FILMS

被引:17
作者
HAUSER, JJ
机构
来源
PHYSICAL REVIEW B | 1985年 / 32卷 / 05期
关键词
D O I
10.1103/PhysRevB.32.2887
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:2887 / 2890
页数:4
相关论文
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