PALLADIUM SILICIDE FORMATION UNDER THE INFLUENCE OF NITROGEN AND OXYGEN IMPURITIES

被引：12
作者：
HO, KT
LIEN, CD
NICOLET, MA
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 02期
关键词：
D O I：
10.1063/1.334794
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：232 / 236
页数：5
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