AN MEV-ION IMPLANTER FOR LARGE AREA APPLICATIONS

被引：46
|
作者：
HALLEN, A [1 ]
INGEMARSSON, PA [1 ]
HAKANSSON, P [1 ]
SUNDQVIST, BUR [1 ]
POSSNERT, G [1 ]
机构：
[1] SVEDBERG LAB,S-75121 UPPSALA,SWEDEN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 36卷 / 03期
关键词：
D O I：
10.1016/0168-583X(89)90679-4
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：345 / 349
页数：5
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