CONTAMINATION LAYERS FORMED BY ARGON ION-BOMBARDMENT

被引：17
|
作者：
SHIMIZU, K [1 ]
KAWAKATSU, H [1 ]
KANAYA, K [1 ]
机构：
[1] KOGAKUIN UNIV,SHINJUKU,TOKYO,JAPAN
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1975年 / 8卷 / 13期
关键词：
D O I：
10.1088/0022-3727/8/13/006
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1453 / 1459
页数：7
相关论文
共 50 条
  • [21] O-18 STUDIES OF ALTERED LAYERS FORMED IN SI AND SIO2 BY ION-BOMBARDMENT
    KILNER, JA
    BEYER, GP
    CHATER, RJ
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 84 (02) : 176 - 180
  • [22] ARGON AUGER EMISSION BY AR+ ION-BOMBARDMENT OF SOME METALS
    VIARISDELESEGNO, P
    HENNEQUIN, JF
    JOURNAL DE PHYSIQUE, 1974, 35 (10): : 759 - 771
  • [23] INFLUENCE OF ARGON ION-BOMBARDMENT ON GASB-PB TUNNELING PROPERTIES
    SORBIER, JP
    GILLET, E
    SURFACE SCIENCE, 1980, 92 (2-3) : 549 - 560
  • [24] SELECTIVE DEPOSITION OF THIN-FILMS BY SUBSTRATE ARGON ION-BOMBARDMENT
    NENDER, C
    BERG, S
    GELIN, B
    THIN SOLID FILMS, 1988, 164 : 475 - 480
  • [25] Fine structure and interface structure of ion-bombardment nitrided layers
    Fengzhao Li
    Dongsheng Sun
    Qing Ao
    Jiyan Dai
    Douxing Li
    Hengqiang Ye
    Science in China Series E: Technological Sciences, 1998, 41 : 579 - 585
  • [26] ION-BOMBARDMENT EFFECTS ON ORIENTATION AND CUTTING CRYSTALLITES IN TUNGSTEN LAYERS
    EVTODY, BN
    KUZNETSOV, GD
    PLESHIVTSEV, NV
    RADIOTEKHNIKA I ELEKTRONIKA, 1989, 34 (04): : 848 - 852
  • [27] ION-BOMBARDMENT OF RESISTS
    ADESIDA, I
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 79 - 86
  • [28] IN-SITU CLEANING OF SPECIMENS IN FIELD-ION MICROSCOPE BY ARGON ION-BOMBARDMENT
    CRANSTOUN, GK
    BROWNING, DJ
    PYKE, DR
    SURFACE SCIENCE, 1973, 34 (03) : 597 - 612
  • [29] Fine structure and interface structure of ion-bombardment nitrided layers
    Li, FZ
    Sun, DS
    Ao, Q
    Dai, JY
    Li, DX
    Ye, HQ
    SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES, 1998, 41 (06): : 579 - 585
  • [30] SPATIAL DISTRIBUTIONS OF PARTICLES SPUTTERED UNDER ARGON ION-BOMBARDMENT OF GRAPHITE
    ECKSTEIN, W
    MASHKOVA, ES
    MOLCHANOV, VA
    SIDOROV, AV
    TOLMACHEV, AI
    FAYAZOV, IM
    IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1991, 55 (12): : 2389 - 2392
12345