TRANSPORT-PROPERTIES OF MULTILAYERED CR/SIOX THIN-FILMS

被引:5
作者
TANIELIAN, MH [1 ]
WILLHITE, JR [1 ]
NIARCHOS, D [1 ]
机构
[1] IIT,CHICAGO,IL 60616
关键词
D O I
10.1063/1.333980
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:417 / 420
页数:4
相关论文
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