MASS DETERMINATION WITH PIEZOELECTRIC QUARTZ CRYSTAL RESONATORS

被引：78

作者：

LU, CS ^{[1
]}

机构：

[1] INFICON INC,E SYRACUSE,NY 13057

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568614

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：578 / 583

页数：6

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[7] ACOUSTIC WAVE ANALYSIS OF OPERATION OF QUARTZ-CRYSTAL FILM-THICKNESS MONITORS [J].

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[8] VERWENDUNG VON SCHWINGQUARZEN ZUR WAGUNG DUNNER SCHICHTEN UND ZUR MIKROWAGUNG [J].

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[10]

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