STUDIES OF SIC FORMATION ON SI (100) BY CHEMICAL VAPOR-DEPOSITION

被引：106
作者：
BOZSO, F [1 ]
YATES, JT [1 ]
CHOYKE, WJ [1 ]
MUEHLHOFF, L [1 ]
机构：
[1] UNIV PITTSBURGH,DEPT PHYS,PITTSBURGH,PA 15260
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 08期
关键词：
D O I：
10.1063/1.335420
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2771 / 2778
页数：8
相关论文
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