MONITORING CHEMICAL-REACTIONS IN METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION (MOCVD)

被引:0
作者
WILLIAMS, JO
HOARE, R
HUNT, N
PARROTT, MJ
机构
来源
MECHANISMS OF REACTIONS OF ORGANOMETALLIC COMPOUNDS WITH SURFACES | 1989年 / 198卷
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O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:131 / 143
页数:13
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