ELECTRON-MICROSCOPY STUDY OF THE AUGE/NI/AU CONTACTS ON GAAS AND GAALAS

被引:13
作者
LILIENTAL, Z [1 ]
CARPENTER, RW [1 ]
ESCHER, J [1 ]
机构
[1] MOTOROLA INC,PHOENIX,AZ 85008
关键词
D O I
10.1016/0304-3991(84)90118-9
中图分类号
TH742 [显微镜];
学科分类号
摘要
引用
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页码:135 / 143
页数:9
相关论文
共 14 条
[1]   ALLOYED OHMIC CONTACTS TO GAAS [J].
BRASLAU, N .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :803-807
[2]  
CASEY HC, 1978, HETEROSTRUCTURE LASE, P277
[3]   SOLID-PHASE FORMATION IN AU-GE-NI, AG-IN-GE, IN-AU-GE GAAS OHMIC CONTACT SYSTEMS [J].
CHRISTOU, A .
SOLID-STATE ELECTRONICS, 1979, 22 (02) :141-&
[4]  
Hayashi I., 1980, Journal of the Physical Society of Japan, V49, P57
[5]  
HOLLAN L, 1980, CURRENT TOPICS MATER, V5, P1
[6]  
KIM T, 1983 MAT RES SOC S P
[7]   DISSOCIATION OF GAAS AND GA0.7AL0.3AS DURING ALLOYING OF GOLD CONTACT FILMS [J].
KINSBRON, E ;
GALLAGHER, PK ;
ENGLISH, AT .
SOLID-STATE ELECTRONICS, 1979, 22 (05) :517-&
[8]   ELECTRON-MICROSCOPE STUDIES OF AN ALLOYED AU/NI-AU-GE OHMIC CONTACT TO GAAS [J].
KUAN, TS ;
BATSON, PE ;
JACKSON, TN ;
RUPPRECHT, H ;
WILKIE, EL .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) :6952-6957
[9]  
LILIENTAL Z, 1983, THIN SOLID FILMS, V104, P17, DOI 10.1016/0040-6090(83)90545-X