TRANSPARENT CONDUCTING UNDOPED AND INDIUM-DOPED ZINC-OXIDE FILMS PREPARED BY SPRAY-PYROLYSIS

被引：77
作者：
MESSAOUDI, C
SAYAH, D
ABDLEFDIL, M
机构：
[1] Laboratory of Materials Physics, Physics Department, Faculty of Sciences, University Mohamed V, Rabat
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1995年 / 151卷 / 01期
关键词：
D O I：
10.1002/pssa.2211510110
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Undoped and indium-doped ZnO thin films are deposited by the spray pyrolysis process onto glass substrates. The effects of starting solution composition and indium doping on the structural, electrical, and optical properties are investigated. The surface morphology of the deposited films is a strong function of the source compounds. Thus two distinct morphologies with large difference in the average grain size are obtained by using separately zinc chloride and zinc acetate. The polycrystalline nature with no second phases is observed by X-ray diffraction. Indium doping leads to a very low resistivity of about 10(-3) Omega cm. High transparency of the films, more than 85% in the visible range, is observed.
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页码：93 / 97
页数：5
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