EFFECT OF ADDITIVES ON THE ELECTROSTATIC FORCE OF ALUMINA ELECTROSTATIC CHUCKS

被引：0
|
作者：
WATANABE, T
KITABAYASHI, T
机构：
来源：
NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 1992年 / 100卷 / 01期
关键词：
ELECTROSTATICS; ELECTROSTATIC CHUCK; ALUMINA; TRANSITION METAL OXIDE; RESISTIVITY;
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Ceramic electrostatic chucks made of alumina ceramics were fabricated. Transition metal oxides (1 wt% TiO2, Cr2O3, MnO2, CoO, CuO) were added to control the resistance of the dielectric insulation layer of the chuck. The electrical resistivity and electrostatic force at R.T. -200-degrees-C were measured, and it was revealed that the electrostatic force of the chuck depends on the electrical resistance of the ceramic. Among the additives examined, TiO2 was found to be most effective for increasing the adhesion force of the alumina electrostatic chuck.
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页码：1 / 6
页数：6
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