ALGAAS/GAAS HETEROJUNCTION BIPOLAR-TRANSISTORS WITH SMALL SIZE FABRICATED BY A MULTIPLE SELF-ALIGNMENT PROCESS USING ONE MASK

被引：30
作者：
INADA, M
OTA, Y
NAKAGAWA, A
YANAGIHARA, M
HIROSE, T
EDA, K
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1987年 / 34卷 / 12期
关键词：
D O I：
10.1109/T-ED.1987.23328
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：2405 / 2411
页数：7
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