DECAPITATION OF TUNGSTEN FIELD EMITTER TIPS DURING SPUTTER SHARPENING

被引：19

作者：

SCHILLER, C

KOOMANS, AA

VANROOY, TL

SCHONENBERGER, C

ELSWIJK, HB

机构：

[1] Philips Research Laboratories, 5656 AA Eindhoven

来源：

SURFACE SCIENCE | 1995年 / 339卷 / 03期

关键词：

FIELD EMISSION; FIELD IONIZATION; NOBLE GASES; SPUTTERING; SURFACE STRESS; TUNGSTEN;

D O I：

10.1016/0039-6028(95)80059-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The sharpening of tungsten tips by sputtering with neon ions shows a surprising phenomenon when the tip radius is smaller than about 20 nm: the gas ions produce a neck in the tip which becomes thinner until it breaks due to the electrostatically induced stress. This decapitation phenomenon limits the attainable tip sharpness to a radius of about 4 nm. The process can repeat in a regular, oscillating manner and is probably at the origin of the unreliability often mentioned in connection with this sharpening method. The effect can be used to determine experimentally the theoretical shear stress of refractory metals.

引用

页码：L925 / L930

页数：6