VUV SOURCE FOR PHOTOCHEMICAL DEPOSITION OF THIN DIELECTRIC FILMS

被引：0
|
作者：
NISSIM, YI [1 ]
FLICSTEIN, J [1 ]
VITEL, Y [1 ]
DULAC, O [1 ]
DEBAUCHE, C [1 ]
LICOPPE, C [1 ]
机构：
[1] UNIV PARIS 06,PHYS PLASMAS DENSES LAB,F-75252 PARIS 05,FRANCE
来源：
ANNALES DE PHYSIQUE | 1994年 / 19卷 / 05期
关键词：
D O I：
10.1051/anphys/1994054
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：229 / 236
页数：8
相关论文
共 50 条
  • [31] USING CHEMICAL VAPOR DEPOSITION TO MAKE DIELECTRIC THIN FILMS
    CAFFREY, RE
    HAUSER, VE
    BELL LABORATORIES RECORD, 1971, 49 (02): : 38 - &
  • [32] Deposition of π-Conjugated Polycyanate Ester Thin Films and Their Dielectric Properties
    Xiong-Yan Zhao
    Ming-Zhu Wang
    Plasma Chemistry and Plasma Processing, 2013, 33 : 237 - 247
  • [33] LASER ABLATION AND DEPOSITION OF SUPERCONDUCTING AND DIELECTRIC THIN-FILMS
    NAQVI, SHH
    SAJJADI, A
    AMIRHAGHI, S
    SABA, F
    MCMINN, R
    BEECH, F
    BOYD, IW
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 13 (01): : 53 - 56
  • [34] Deposition of π-Conjugated Polycyanate Ester Thin Films and Their Dielectric Properties
    Zhao, Xiong-Yan
    Wang, Ming-Zhu
    PLASMA CHEMISTRY AND PLASMA PROCESSING, 2013, 33 (01) : 237 - 247
  • [35] Electrophoretic deposition of CdSe nanocrystal films onto dielectric polymer thin films
    Hasan, Saad A.
    Kavich, Dustin W.
    Mahajan, Sameer V.
    Dickerson, James H.
    THIN SOLID FILMS, 2009, 517 (08) : 2665 - 2669
  • [36] LASER EVAPORATION DEPOSITION OF SUPERCONDUCTING AND DIELECTRIC THIN-FILMS
    KWOK, HS
    MATTOCKS, P
    SHI, L
    WANG, XW
    WITANACHCHI, S
    YING, QY
    ZHENG, JP
    SHAW, DT
    APPLIED PHYSICS LETTERS, 1988, 52 (21) : 1825 - 1827
  • [37] Nickel β-diketonate complexes as precursors for the photochemical deposition of nickel oxide thin films
    Buono-Core, GE
    Tejos, M
    Alveal, G
    Hill, RH
    JOURNAL OF MATERIALS SCIENCE, 2000, 35 (19) : 4873 - 4877
  • [38] Photochemical Deposition of Semiconductor Thin Films and Their Application for Solar Cells and Gas Sensors
    Ichimura, M.
    Gunasekaran, M.
    Sueyoshi, T.
    NANOSCIENCE AND NANOTECHNOLOGY, 2009, 1136 : 138 - 145
  • [39] LASER PHOTOCHEMICAL DEPOSITION OF GERMANIUM-SILICON ALLOY THIN-FILMS
    BURKE, HH
    HERMAN, IP
    TAVITIAN, V
    EDEN, JG
    APPLIED PHYSICS LETTERS, 1989, 55 (03) : 253 - 255
  • [40] Enhanced electrical and optical properties of CdS: Na thin films by photochemical deposition
    Kumar, V. Nirmal
    Suriakarthick, R.
    Gopalakrishnan, R.
    Hayakawa, Y.
    JOURNAL OF CRYSTAL GROWTH, 2017, 468 : 208 - 211
12345