共 50 条
- [31] ELECTRON-CYCLOTRON-RESONANCE PLASMA REACTOR FOR CRYOGENIC ETCHING REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (12): : 3572 - 3584
- [32] MEASUREMENT OF ION TEMPERATURE IN ELECTRON-CYCLOTRON-RESONANCE PLASMA JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (11B): : L1698 - L1700
- [34] ELECTRON-CYCLOTRON-RESONANCE PLASMA OXIDATION STUDIES OF INP JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 540 - 546
- [35] TUNGSTEN ETCHING USING AN ELECTRON-CYCLOTRON-RESONANCE PLASMA JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03): : 810 - 814
- [36] Research on electromagnetic characters of electron-cyclotron-resonance plasma PROCEEDINGS OF THE 2004 CHINA-JAPAN JOINT MEETING ON MICROWAVES, 2004, : 210 - 213
- [38] An Experimental Apparatus with Microwave Electron-Cyclotron-Resonance Plasma Instruments and Experimental Techniques (English Translation of Pribory I Tekhnika Eksperimenta), 1996, 39
- [40] CHARACTERIZATION AND IN-SITU MONITORING OF A NOVEL COMPACT ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (11): : 5252 - 5256