AN ATOM-PROBE COMPOSITIONAL STUDY OF PD-SI INTERFACES

被引：3
|
作者：
SAKATA, T [1 ]
HASEGAWA, Y [1 ]
KOBAYASHI, A [1 ]
SAKURAI, T [1 ]
机构：
[1] UNIV TOKYO,INST SOLID STATE PHYS,TOKYO 106,JAPAN
来源：
JOURNAL DE PHYSIQUE | 1986年 / 47卷 / C-7期
关键词：
D O I：
10.1051/jphyscol:1986755
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：321 / 326
页数：6
相关论文
共 50 条
  • [1] ATOM PROBE FIM STUDY OF AN AMORPHOUS PD-SI ALLOY
    YAMAMOTO, M
    YAO, H
    NENNO, S
    OHNAKA, I
    FUKUSAKO, T
    JOURNAL DE PHYSIQUE, 1987, 48 (C-6): : 311 - 316
  • [2] ATOM-PROBE STUDY OF SILICIDE FORMATION AT NI/SI INTERFACES
    NISHIKAWA, O
    SHIBATA, M
    YOSHIMURA, T
    NOMURA, E
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (01): : 21 - 23
  • [3] AN ATOM-PROBE STUDY OF SEMICONDUCTOR-METAL INTERFACES
    JIMBO, A
    HASHIZUME, T
    SAKATA, T
    SAKURAI, T
    JOURNAL DE PHYSIQUE, 1986, 47 (C-2): : 321 - 327
  • [4] ATOM-PROBE STUDY OF AL-GAAS INTERFACES
    NISHIKAWA, O
    KANEDA, O
    SHIBATA, M
    NOMURA, E
    JOURNAL DE PHYSIQUE, 1984, 45 (NC9): : 459 - 464
  • [5] ATOM-PROBE STUDY OF AL-NB INTERFACES
    OKUNO, K
    YAMASHITA, H
    OIDA, K
    NISHIKAWA, O
    JOURNAL DE PHYSIQUE, 1987, 48 (C-6): : 511 - 516
  • [6] ATOM-PROBE STUDY OF METAL-SIC INTERFACES
    NAKAMURA, S
    HASEGAWA, Y
    HASHIZUME, T
    SAKURAI, T
    JOURNAL DE PHYSIQUE, 1986, 47 (C-7): : 309 - 314
  • [7] MICROSCOPY AND MICROANALYSIS OF INTERFACES ON A SUBNANOMETRIC SCALE WITH THE ATOM-PROBE
    BLAVETTE, D
    LETELLIER, L
    DECONIHOUT, B
    ANNALES DE CHIMIE-SCIENCE DES MATERIAUX, 1993, 18 (5-6): : 303 - 310
  • [8] PULSED-LASER ATOM-PROBE STUDY OF SI, GAAS AND GAP
    NISHIKAWA, O
    NOMURA, E
    YANAGISAWA, M
    NAGAI, M
    JOURNAL DE PHYSIQUE, 1986, 47 (C-2): : 303 - 308
  • [9] PULSED-LASER ATOM-PROBE STUDY OF AL-GAAS INTERFACES
    NISHIKAWA, O
    YANAGISAWA, M
    NAGAI, M
    JOURNAL DE PHYSIQUE, 1986, 47 (C-7): : 303 - 308
  • [10] ATOM-PROBE STUDY OF GA-MO AND SN-IR INTERFACES
    NISHIKAWA, O
    NACHI, M
    KURIHARA, K
    TSUNASHIMA, Y
    HARA, Y
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1981, 67 (02): : 461 - 468
12345