ACTIVATION OF BORON IMPLANTED IN HG0.7CD0.3 TE BY HIGH-TEMPERATURE ANNEALING

被引:3
作者
WU, TB
LAM, KY
CHIANG, CD
GONG, J
YANG, SJ
机构
[1] NATL TSING HUA UNIV,ELECT ENGN,HSINCHU 300,TAIWAN
[2] CHUNG SHAN INST SCI & TECHNOL,LUNGTAN,TAIWAN
关键词
D O I
10.1063/1.340444
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:4983 / 4988
页数:6
相关论文
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