A CASCADE DIFFUSION PUMP SYSTEM FOR AN ELECTRON-MICROSCOPE

被引：4

作者：

YOSHIMURA, N

HIRANO, H

NORIOKA, S

ETOH, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 01期

关键词：

D O I：

10.1116/1.572627

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：61 / 67

页数：7

共 18 条

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[10]

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