RADIOACTIVE N NI-STAR TRACER STUDY OF THE NICKEL SILICIDE GROWTH-MECHANISM

被引：38

作者：

BAGLIN, JEE

ATWATER, HA

GUPTA, D

DHEURLE, FM

机构：

来源：

THIN SOLID FILMS | 1982年 / 93卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(82)90130-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：255 / 264

页数：10

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