PREPARATION AND PROPERTIES OF III-V NITRIDE THIN-FILMS

被引：177

作者：

KUBOTA, K

KOBAYASHI, Y

FUJIMOTO, K

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 07期

关键词：

D O I：

10.1063/1.344181

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2984 / 2988

页数：5

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