A NEGLECTED PARAMETER (WATER CONTAMINATION) IN SPUTTERING OF MOS2 FILMS

被引：47
作者：
BUCK, V
机构：
来源：
THIN SOLID FILMS | 1986年 / 139卷 / 02期
关键词：
D O I：
10.1016/0040-6090(86)90334-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：157 / 168
页数：12
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共 37 条
[1]   MORPHOLOGIES OF RF SPUTTER-DEPOSITED SOLID LUBRICANTS [J].
ANDERSSON, KAB ;
KARLSSON, SE ;
OHMAE, N .
VACUUM, 1977, 27 (04) :379-382
[2]   THE ADSORPTION OF BENZENE AND WATER VAPOR BY MOLYBDENUM DISULFIDE [J].
BALLOU, EV ;
ROSS, S .
JOURNAL OF PHYSICAL CHEMISTRY, 1953, 57 (07) :653-657
[3]  
BUCK V, 1986, VACUUM TAIP, V31, P89
[4]  
BUCK V, 1983, DFVLR NACHR, V40, P30
[5]   RF SPUTTERED MOS2 PARAMETER EFFECTS ON WEAR LIFE [J].
CHRISTY, RI ;
LUDWIG, HR .
THIN SOLID FILMS, 1979, 64 (02) :223-229
[6]  
DAYTON B, 1962, 8TH T VAC S P 2ND IN, V1, P42
[7]   STOICHIOMETRY AND FRICTION PROPERTIES OF SPUTTERED MOSX LAYERS [J].
DIMIGEN, H ;
HUBSCH, H ;
WILLICH, P ;
REICHELT, K .
THIN SOLID FILMS, 1985, 129 (1-2) :79-91
[8]   EFFECTS OF CRYSTALLITE ORIENTATION ON ENVIRONMENTAL STABILITY AND LUBRICATION PROPERTIES OF SPUTTERED MOS2 THIN-FILMS [J].
FLEISCHAUER, PD .
ASLE TRANSACTIONS, 1984, 27 (01) :82-88
[9]  
FLEISCHAUER PD, 1984, ASLE SPEC PUBL, V14, P223
[10]  
FLEISCHAUER PD, 1984, ASLE SPEC PUBL, V14
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