MECHANISMS OF REACTIVE SPUTTERING OF TITANIUM NITRIDE AND TITANIUM CARBIDE .2. MORPHOLOGY AND STRUCTURE

被引：281
作者：
SUNDGREN, JE
JOHANSSON, BO
KARLSSON, SE
HENTZELL, HTG
机构：
来源：
THIN SOLID FILMS | 1983年 / 105卷 / 04期
关键词：
D O I：
10.1016/0040-6090(83)90319-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：367 / 384
页数：18
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