MEASUREMENTS OF ANGULAR EVAPORATION CHARACTERISTICS OF SOURCES

被引：5

作者：

DOBROWOLSKI, JA

RANGER, M

WILKINSON, RL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 03期

关键词：

D O I：

10.1116/1.572030

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1403 / 1408

页数：6

共 23 条

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[2] USE OF QUARTZ-CRYSTAL RATE MONITOR TO DETERMINE VAPOR DISTRIBUTIONS
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[10] A PRACTICAL HIGH-CAPACITY, HIGH EVAPORATION, RATE-RESISTANCE-HEATED SOURCE
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