THERMAL-REACTION OF TI EVAPORATED ON GAAS

被引:52
作者
WADA, O [1 ]
YANAGISAWA, S [1 ]
TAKANASHI, H [1 ]
机构
[1] FIJITSU LABS LTD,NAKAHARA KU,KAWASAKI,JAPAN
关键词
D O I
10.1063/1.89039
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:263 / 265
页数:3
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