STOICHIOMETRY CONTROL MECHANISMS FOR BIAS-SPUTTERED ZINC-OXIDE THIN-FILMS

被引：18
作者：
BRETT, MJ
PARSONS, RR
机构：
来源：
CANADIAN JOURNAL OF PHYSICS | 1985年 / 63卷 / 06期
关键词：
D O I：
10.1139/p85-132
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
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页码：819 / 825
页数：7
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