Pulsed UV laser irradiation of polymer surfaces

被引:13
作者
Hiraoka, H
机构
关键词
pulsed UV-laser irradiation; polymer surfaces; nano-structure fabrications; diamond deposition;
D O I
10.1016/1010-6030(95)04165-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Pulsed UV lasers, such as the fourth harmonic emission of an Nd:YAG laser at 266 nm and an ArF excimer laser at 193 nm, were used to obtain modification of polymer surfaces, nanostructure fabrications on polymer and silicon substrates and diamond deposition using photoablated polymer plumes. The results are reported here.
引用
收藏
页码:129 / 133
页数:5
相关论文
共 19 条
[1]   TECHNIQUES FOR DEPOSITING DLC FILMS BY PULSED LASER ABLATION OF ORGANIC-SOLIDS [J].
ATHWAL, IS ;
MELE, A ;
OGRYZLO, EA .
DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) :731-734
[2]   TOWARDS A GENERAL CONCEPT OF DIAMOND CHEMICAL VAPOR-DEPOSITION [J].
BACHMANN, PK ;
LEERS, D ;
LYDTIN, H .
DIAMOND AND RELATED MATERIALS, 1991, 1 (01) :1-12
[3]   CHARACTERIZATION OF SUBMICROMETER PERIODIC STRUCTURES PRODUCED ON POLYMER SURFACES WITH LOW-FLUENCE ULTRAVIOLET-LASER RADIATION [J].
BOLLE, M ;
LAZARE, S .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (07) :3516-3524
[4]   SUBMICRON PERIODIC STRUCTURES PRODUCED ON POLYMER SURFACES WITH POLARIZED EXCIMER LASER ULTRAVIOLET-RADIATION [J].
BOLLE, M ;
LAZARE, S ;
LEBLANC, M ;
WILMES, A .
APPLIED PHYSICS LETTERS, 1992, 60 (06) :674-676
[5]   PERIODIC SURFACE-STRUCTURES IN THE EXCIMER LASER ABLATIVE ETCHING OF POLYMERS [J].
DYER, PE ;
FARLEY, RJ .
APPLIED PHYSICS LETTERS, 1990, 57 (08) :765-767
[6]   LASER-INDUCED SUB-HALF-MICROMETER PERIODIC STRUCTURE ON POLYMER SURFACES [J].
HIRAOKA, H ;
SENDOVA, M .
APPLIED PHYSICS LETTERS, 1994, 64 (05) :563-565
[7]   SURFACE MODIFICATIONS OF KAPTON AND CURED POLYIMIDE FILMS BY ARF EXCIMER LASER - APPLICATIONS TO IMAGEWISE WETTING AND METALLIZATION [J].
HIRAOKA, H ;
LAZARE, S .
APPLIED SURFACE SCIENCE, 1990, 46 (1-4) :264-271
[8]   SUB-1/4-MU-M PERIODIC PATTERNS WITH ND-YAG LASER AND IMAGE TRANSFER TO SILICON SURFACE BY REACTIVE ION ETCHING [J].
HIRAOKA, H ;
SENDOVA, M ;
LEE, CH .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (12B) :7135-7137
[9]  
HIRAOKA H, 1988, J MICROELECTRON ENG, V6, P407
[10]  
HIRAOKA H, 1994, J PHOTOPOLYM SCI TEC, V7, P299