STRUCTURE AND CHEMICAL-COMPOSITION OF RF-SPUTTERED BORON-NITRIDE FILMS

被引：21
作者：
ROTHER, B
WEISSMANTEL, C
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1985年 / 87卷 / 02期
关键词：
D O I：
10.1002/pssa.2210870242
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：K119 / K121
页数：3
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[7]   RADIO-FREQUENCY SPUTTER DEPOSITED BORON-NITRIDE FILMS [J].
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AITA, CR ;
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :322-325
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