REGULARIZATION IN ELLIPSOMETRY - NEAR-SURFACE DEPTH PROFILES OF THE REFRACTIVE-INDEX

被引：17
作者：
KAISER, JH
机构：
来源：
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY | 1988年 / 45卷 / 01期
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D O I：
10.1007/BF00692332
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：1 / 5
页数：5
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